Effects of nitrogen addition to fluorinated silicon dioxide films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 9 A, 1998, Pages 4904-4909

  Hasegawa, Seiichi ^a   Saito, Atsusi ^a   Lubguban, Jorge A ^a   Inokuma, Takao ^a   Kurata, Yoshihiro ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

Addition of nitrogen; Charge transfer; Dielectric properties; Fluorinated silicon dioxide; Vibrational absorption; Water absorption

Indexed keywords

CHARGE TRANSFER; CHEMICAL BONDS; COMPOSITION EFFECTS; FLUORINE; LIGHT ABSORPTION; NITROGEN; OPTICAL VARIABLES MEASUREMENT; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE; WATER ABSORPTION;

AMMONIA FLOW RATE; BONDING PROPERTIES; FLUORINATED SILICON DIOXIDE FILMS; VIBRATION ABSORPTION;

SILICA;

EID: 0032156057     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.4904     Document Type: Article

References (16)

1. Sang Woo Lim, Y. Shimogaki, Y. Nakano, K. Tada and H. Komiyama: Jpn. J. Appl. Phys. 35 (1996) 1468.
2. G. Lucovsky and H.-Y. Yang: Ext. Abstr. 1996 Int. Conf. Solid State Devices and Materials, Yokohama, 1996 (Business Center for Academic Societies, Tokyo, 1996) p. 356.
3. H. Miyajima, R. Katsumata, Y. Nakasaki, Y. Nishiyama and N. Hayasaka: Jpn. J. Appl. Phys. 35 (1996) 6217.
4. H. Kitoh, M. Muroyama, M. Sasaki, M. Iwasawa and H. Kimura: Jpn. J. Appl. Phys. 35 (1996) 1464.
5. S. Hasegawa, T. Tsukaoka, T. Inokuma and Y. Kurata: to be published in J. Non-Cryst. Solids.
6. K. Yamamoto, M. Tsuji, K. Washio, H. Kasahara and K. Abe: J. Phys. Soc. Jpn. 52 (1983) 925.
7. L. He, T. Inokuma and S. Hasegawa: Jpn. J. Appl. Phys. 35 (1996) 1503.
8. L. Pauling: The Nature of the Chemical Bonds (Cornell University Press, New York, 1960) 3rd ed., p. 75.
9. P. G. Pai, S. S. Chao, Y. Takagi and G. Lucovsky: J. Vac. Sci. Technol. A 4 (1986) 689.
10. L. He, T. Inokuma, Y. Kurata and S. Hasegawa: J. Non-Cryst. Solids 185 (1995) 249.
11. Y. Okada and S. Nakajima: Appl. Phys. Lett. 59 (1991) 1066.
12. R. T. Sanderson: Chemical Bonds and Bond Energy (Academic Press, New York, 1976) 2nd ed., p. 77
13. S. Hasegawa, L. He, Y. Amano and T. Inokuma: Phys. Rev. B 48 (1993) 5315.
14. J. Chelikowsky and M. Schluter: Phys. Rev. B 15 (1977) 4020.
15. M. H. Brodsky, M. H. Cardona and J. J. Cuomo: Phy. Rev. B 16 (1977) 3556.
16. A. C. Adams: Solid State Technol. (1983) April, 135.