A path to nanolithography

MRS Bulletin

Volumn 21, Issue 12, 1996, Pages 56-61

  Cerrina, F ^a,b,c,d   Marrian, C ^e  

^a University of Wisconsin ^*  (United States)

^b SEMATECH Ctr Excellence X ray L

^c SAPIENZA UNIVERSITY OF ROME   (Italy)

^d University of Wisconsin

^e NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006274655     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/s0883769400032127     Document Type: Article

References (26)

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