Barium bis(β-diketonate)·tetraglyme complexes as potential CVD precursors for electronic materials

Materials Research Society Symposium - Proceedings

Volumn 415, Issue , 1996, Pages 99-104

  Luten, Henry A III ^a   Otway, David J ^a   Rees Jr , William S ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC PROPERTIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDES; THERMODYNAMIC STABILITY; THIN FILMS; VAPOR PRESSURE;

ACETYLACETONATE; POST DEPOSITION TREATMENT; SUPERCONDUCTING METAL OXIDE;

BARIUM COMPOUNDS;

EID: 0029754384     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)