SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 1823-1832

X-ray photoelectron spectroscopy damage characterization of reactively ion etched InP in CH4-H2 plasmas

(3) Feurprier, Y a Cardinaud, Ch a Turban, G a

a INSTITUT DES MATÉRIAUX JEAN ROUXEL (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001543246 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (14)

References (17)

1
- 0000252854
- U. Niggebrügge, M. Klug, and G. Garus, Inst. Phys. Conf. Ser. 79, 367 (1985).
- (1985) Inst. Phys. Conf. Ser. , vol.79 , pp. 367
- Niggebrügge, U.¹ Klug, M.² Garus, G.³

2
- 0026928804
- H. Sugimoto, Y. Abe, T. Ohishi, K. Ohtsuka, T. Matsui, H. Yoshiyasu, and Y. Nomura, J. Electrochem. Soc. 139, 2969 (1992).
- (1992) J. Electrochem. Soc. , vol.139 , pp. 2969
- Sugimoto, H.¹ Abe, Y.² Ohishi, T.³ Ohtsuka, K.⁴ Matsui, T.⁵ Yoshiyasu, H.⁶ Nomura, Y.⁷

3
- 11644278213
- edited by B. Jalali and S. J. Pearton Artech House, Boston, MA
- S. J. Pearton, in InP HBT's: Growth, Processing and Applications, edited by B. Jalali and S. J. Pearton (Artech House, Boston, MA, 1995), p. 47.
- (1995) InP HBT's: Growth, Processing and Applications , pp. 47
- Pearton, S.J.¹

4
- 0029307753
- C. Y. Park, J. B. Yoo, C. Park, K. S. Hyun, D. K. Oh, Y. H. Lee, C. Lee, and H. M. Park, J. Vac. Sci. Technol. B 13, 974 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 974
- Park, C.Y.¹ Yoo, J.B.² Park, C.³ Hyun, K.S.⁴ Oh, D.K.⁵ Lee, Y.H.⁶ Lee, C.⁷ Park, H.M.⁸

5
- 0006372712
- H. E. G. Arnot, R. W. Glew, G. Schiavini, L. J. Rigby, and A. Piccirillo, Appl. Phys. Lett. 62, 3189 (1993).
- (1993) Appl. Phys. Lett. , vol.62 , pp. 3189
- Arnot, H.E.G.¹ Glew, R.W.² Schiavini, G.³ Rigby, L.J.⁴ Piccirillo, A.⁵

6
- 0342824933
- J. E. Schramm, E. L. Hu, J. L. Merz, J. U. Brown, M. A. Melendes, M. A. Thompson, and A. S. Brown, J. Vac. Sci. Technol. B 11, 2280 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2280
- Schramm, J.E.¹ Hu, E.L.² Merz, J.L.³ Brown, J.U.⁴ Melendes, M.A.⁵ Thompson, M.A.⁶ Brown, A.S.⁷

7
- 0029698174
- Schwäbisch Gmünd, Germany
- Y. Kondo, K. Kishi, M. Itoh, H. Oohashi, and M. Yamamoto, 8th International Conference on Indium Phosphide and Related Materials, Schwäbisch Gmünd, Germany, 1996, p. 384.
- (1996) 8th International Conference on Indium Phosphide and Related Materials , pp. 384
- Kondo, Y.¹ Kishi, K.² Itoh, M.³ Oohashi, H.⁴ Yamamoto, M.⁵

8
- 0001684451
- T. R. Hayes, M. A. Dreisbach, P. M. Thomas, W. C. Dautremont-Smith, and L. A. Heimbrook, J. Vac. Sci. Technol. B 7, 1130 (1989).
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 1130
- Hayes, T.R.¹ Dreisbach, M.A.² Thomas, P.M.³ Dautremont-Smith, W.C.⁴ Heimbrook, L.A.⁵

9
- 0039081753
- T. R. Hayes, U. K. Chakrabarti, F. A. Baiocchi, A. B. Emerson, H. S. Luftman, and W. C. Dautremont-Smith, J. Appl. Phys. 68, 785 (1990).
- (1990) J. Appl. Phys. , vol.68 , pp. 785
- Hayes, T.R.¹ Chakrabarti, U.K.² Baiocchi, F.A.³ Emerson, A.B.⁴ Luftman, H.S.⁵ Dautremont-Smith, W.C.⁶

10
- 0027542468
- M. C. Peignon, Ch. Cardinaud, and G. Turban, J. Electrochem. Soc. 140, 505 (1993).
- (1993) J. Electrochem. Soc. , vol.140 , pp. 505
- Peignon, M.C.¹ Cardinaud, Ch.² Turban, G.³

11
- 0000782292
- Y. Feurprier, Ch. Cardinaud, and G. Turban, J. Vac. Sci. Technol. B 15, 1733 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 1733
- Feurprier, Y.¹ Cardinaud, Ch.² Turban, G.³

12
- 0031212431
- Y. Feurprier, Ch. Cardinaud, and G. Turban, Plasma Sources Sci. Technol. 6, 334 (1997).
- (1997) Plasma Sources Sci. Technol. , vol.6 , pp. 334
- Feurprier, Y.¹ Cardinaud, Ch.² Turban, G.³

13
- 0031270789
- Y. Feurprier, Ch. Cardinaud, B. Grolleau, and G. Turban, Plasma Sources Sci. Technol. 6, 561 (1997).
- (1997) Plasma Sources Sci. Technol. , vol.6 , pp. 561
- Feurprier, Y.¹ Cardinaud, Ch.² Grolleau, B.³ Turban, G.⁴

14
- 33744538097
- D. A. Shirley, Phys. Rev. B 5, 4709 (1972).
- (1972) Phys. Rev. B , vol.5 , pp. 4709
- Shirley, D.A.¹

15
- 0000169232
- D. W. Marquardt, J. Soc. Ind. Appl. Math. 11, 431 (1963).
- (1963) J. Soc. Ind. Appl. Math. , vol.11 , pp. 431
- Marquardt, D.W.¹

16
- 0001243862
- D. L. Melville, J. G. Simmons, and D. A. Thompson, J. Vac. Sci. Technol. B 11, 2038 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2038
- Melville, D.L.¹ Simmons, J.G.² Thompson, D.A.³

17
- 0012225405
- P. Kae-Nune, J. Perrin, J. Guillon, and J. Jolly, Plasma Sources Sci. Technol. 4, 250 (1995).
- (1995) Plasma Sources Sci. Technol. , vol.4 , pp. 250
- Kae-Nune, P.¹ Perrin, J.² Guillon, J.³ Jolly, J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.