SCOPUS 정보 검색 플랫폼

Volumn 3396, Issue , 1998, Pages 238-243

Investigation of micro-opto-electro-mechanical components with a holographic microscopic interferometer

Author keywords

[No Author keywords available]

Indexed keywords

HOLOGRAPHIC INTERFEROMETRY; MICROSCOPES; MICROSENSORS; PHASE SHIFT; VECTORS;

HOLOGRAPHIC INTERFEROMETRIC MICROSCOPES (HIM);

MICROELECTROMECHANICAL DEVICES;

EID: 0032337610 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.301528 Document Type: Conference Paper

Times cited : (4)

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