Review on the importance of measurement technique in micromachine technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 26-38

  Umeda, Akira ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; STANDARDIZATION; TECHNOLOGY;

MINISTRY OF INTERNATIONAL TRADE AND INDUSTRY IN JAPAN; NATIONAL RESEARCH LABORATORY OF METROLOGY;

MICROMACHINING;

EID: 0030393834     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250942     Document Type: Conference Paper

References (16)