SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 2 SUPPL. B, 1996, Pages 1069-1072

Initial oxidation processes of H-terminated Si(100) surfaces studied by high-resolution electron energy loss spectroscopy

(5) Ikeda, Hiroya a Hotta, Koji a Furuta, Shinya a Zaima, Shigeaki a Yasuda, Yukio a

a NAGOYA UNIVERSITY (Japan)

Author keywords

Bond angle; Central force network model; Force constant; H termination; HREELS; Oxidation process; SiO2; Structural change

Indexed keywords

ADSORPTION; AUGER ELECTRON SPECTROSCOPY; ELECTRON BEAMS; ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROGEN; LOW ENERGY ELECTRON DIFFRACTION; OXIDATION; OXYGEN; SILICA; SUBSTRATES; SURFACES;

ATOMIC HYDROGEN EXPOSURE; AUGER ELECTRON SPECTROSCOPY MEASUREMENT; OXYGEN ATOMS; SUBSTRATE TEMPERATURE; THERMAL CLEANING;

SEMICONDUCTING SILICON;

EID: 0030078956 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.1069 Document Type: Article

Times cited : (24)

References (11)

1
- 36549104861
- N. Hirashita, M. Kinoshita, I. Aikawa and T. Ajioka: Appl. Phys. Lett. 56 (1990) 451.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 451
- Hirashita, N.¹ Kinoshita, M.² Aikawa, I.³ Ajioka, T.⁴

2
- 21544433109
- G. S. Higashi, Y. J. Chabal, G. W. Trucks and K. Raghavachari: Appl. Phys. Lett. 56 (1990) 656.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 656
- Higashi, G.S.¹ Chabal, Y.J.² Trucks, G.W.³ Raghavachari, K.⁴

3
- 0000365698
- H. Ikeda, K. Hotta, T. Yamada, S. Zaima, H. Iwano and Y. Yasuda: J. Appl. Phys. 77 (1995) 5125.
- (1995) J. Appl. Phys. , vol.77 , pp. 5125
- Ikeda, H.¹ Hotta, K.² Yamada, T.³ Zaima, S.⁴ Iwano, H.⁵ Yasuda, Y.⁶

4
- 0029290801
- H. Ikeda, K. Hotta, T. Yamada, S. Zaima and Y. Yasuda: Jpn. J. Appl. Phys. 34 (1995) 2191.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 2191
- Ikeda, H.¹ Hotta, K.² Yamada, T.³ Zaima, S.⁴ Yasuda, Y.⁵

5
- 4243150405
- Princeton, June, Tu-P-55
- H. Ikeda, K. Hotta, S. Furuta, S. Zaima and Y. Yasuda: Ext. Abstr. Fifth Int. Conf. the Formation of Semiconductor Interfaces, Princeton, June, Tu-P-55, 1995.
- (1995) Ext. Abstr. Fifth Int. Conf. the Formation of Semiconductor Interfaces
- Ikeda, H.¹ Hotta, K.² Furuta, S.³ Zaima, S.⁴ Yasuda, Y.⁵

6
- 0003873514
- Academic, New York
- H. Ibach and D. L. Mills: Electron Energy Loss Spectroscopy and Surface Vibrations (Academic, New York, 1982).
- (1982) Electron Energy Loss Spectroscopy and Surface Vibrations
- Ibach, H.¹ Mills, D.L.²

7
- 0343677398
- J. A. Schaefer, D. Frankel, F. Stucki, W. Göpel and G. J. Lapeyre: Surf. Sci. 139 (1984) L209.
- (1984) Surf. Sci. , vol.139
- Schaefer, J.A.¹ Frankel, D.² Stucki, F.³ Göpel, W.⁴ Lapeyre, G.J.⁵

8
- 0000292434
- J. A. Schaefer and W. Göpel: Surf. Sci. 155 (1985) 535.
- (1985) Surf. Sci. , vol.155 , pp. 535
- Schaefer, J.A.¹ Göpel, W.²

9
- 58149369808
- L. Incoccia, A. Baierna, S. Gramm, C. Kunz, F. Senf and I. Storjohann: Surf. Sci. 189/190 (1987) 453.
- (1987) Surf. Sci. , vol.189-190 , pp. 453
- Incoccia, L.¹ Baierna, A.² Gramm, S.³ Kunz, C.⁴ Senf, F.⁵ Storjohann, I.⁶

10
- 35949033170
- P. N. Sen and M. F. Thorpe: Phys. Rev. B 15 (1977) 4030.
- (1977) Phys. Rev. B , vol.15 , pp. 4030
- Sen, P.N.¹ Thorpe, M.F.²

11
- 35949029886
- F. L. Galeener: Phys. Rev. B 19 (1979) 4292.
- (1979) Phys. Rev. B , vol.19 , pp. 4292
- Galeener, F.L.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.