The site-specific reactivity of isopropanol in aqueous silicon etching: Controlling morphology with surface chemistry

Journal of Chemical Physics

Volumn 111, Issue 20, 1999, Pages 9125-9128

  Newton, Theresa A ^a   Huang, Yi Chiau ^b   Lepak, Lori A ^a   Hines, Melissa A ^a  

^a Department of Molecular Biology and Genetics   (United States)

^b Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001336468     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.479386     Document Type: Article

References (21)

1. B. Puers and W. Sansen, Sens. Actuators A 21-23, 1036 (1990); A. Merlos, M. Acero, M. H. Bao, J. Bousells, and J. Esteve, ibid. 37-38, 737 (1993).
2. B. Puers and W. Sansen, Sens. Actuators A 21-23, 1036 (1990); A. Merlos, M. Acero, M. H. Bao, J. Bousells, and J. Esteve, ibid. 37-38, 737 (1993).
3. S. A. Campbell, K. Cooper, L. Dixon, R. Earwaker, S. N. Port, and D. J. Schiffrin, J. Micromech. Microeng. 5, 209 (1995).
4. E. D. Palik, H. F. Gray, and P. B. Klein, J. Electrochem. Soc. 130, 956 (1983).
5. P. Allongue, Phys. Rev. Lett. 77, 1986 (1996).
6. H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgärtel, J. Electrochem. Soc. 137, 3612 (1990).
7. J. V. Seiple and J. P. Pelz, Phys. Rev. Lett. 73, 999 (1994); M. Chander, D. A. Goetsch, C. M. Aldao, and J. H. Weaver, ibid. 74, 2014 (1995); M. Fouchier and J. J. Boland, Phys. Rev. B 57, 8997 (1998).
8. J. V. Seiple and J. P. Pelz, Phys. Rev. Lett. 73, 999 (1994); M. Chander, D. A. Goetsch, C. M. Aldao, and J. H. Weaver, ibid. 74, 2014 (1995); M. Fouchier and J. J. Boland, Phys. Rev. B 57, 8997 (1998).
9. J. V. Seiple and J. P. Pelz, Phys. Rev. Lett. 73, 999 (1994); M. Chander, D. A. Goetsch, C. M. Aldao, and J. H. Weaver, ibid. 74, 2014 (1995); M. Fouchier and J. J. Boland, Phys. Rev. B 57, 8997 (1998).
10. G. S. Higashi, Y. J. Chabal, G. W. Trucks, and K. Raghavachari, Appl. Phys. Lett. 56, 656 (1990).
11. J. Flidr, Y.-C. Huang, T. A. Newton, and M. A. Hines, Chem. Phys. Lett. 302, 85 (1999).
12. J. Flidr, Y.-C. Huang, T. A. Newton, and M. A. Hines, J. Chem. Phys. 108, 5542 (1998).
13. R. J. P. Corriu and C. Guerin, Adv. Organometal. Chem. 20, 265 (1982).
14. M. A. Hines, Y. J. Chabal, T. D. Harris, and A. L. Harris, J. Chem. Phys. 101, 8055 (1994).
15. -3 for a 2% IPA solution, irrespective of pH. E. P. Serjeant and B. Dempsey, Ionisation Constants of Organic Acids in Aqueous Solution (Pergamon, Oxford, 1979).
16. T. Bitzer, N. V. Richardson, and D. J. Schiffrin, Surf. Sci. 382, L686 (1997).
17. V. Atluri, N. Herbots, D. Dagel, H. Jacobson, M. Johnson, R. Carpio, and B. Fowler, Mater. Res. Soc. Symp. Proc. 477, 281 (1997).
18. G. W. Trucks, K. Raghavachari, G. S. Higashi, and Y. J. Chabal, Phys. Rev. Lett. 65, 504 (1990); F. A. Cotton and G. Wilkinson, Advanced Inorganic Chemistry (Wiley, New York, 1980), Chap. 12.
19. G. W. Trucks, K. Raghavachari, G. S. Higashi, and Y. J. Chabal, Phys. Rev. Lett. 65, 504 (1990); F. A. Cotton and G. Wilkinson, Advanced Inorganic Chemistry (Wiley, New York, 1980), Chap. 12.
20. J. E. Bartmess, J. A. Scott, and R. T. McIver, Jr., J. Am. Chem. Soc. 101, 6046 (1979).
21. G. D. Homer and L. H. Sommer, J. Am. Chem. Soc. 95, 7700 (1973).