Comparison and reproducibility of H-passivation of Si(100) with HF in methanol, ethanol, isopropanol and water by IBA, TMAFM, and FTIR

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 281-292

  Atluri, V ^a   Herbots, N ^a   Dagel, D ^a   Jacobsson, H ^a   Johnson, M ^a   Carpio, R ^a   Fowler, B ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DESORPTION; ETCHING; ETHANOL; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROFLUORIC ACID; METHANOL; OXYGEN; PARTICLES (PARTICULATE MATTER); PASSIVATION; SURFACE ROUGHNESS; WATER;

ATTENUATION TOTAL REFLECTION (ATR); ELASTIC RECOIL DETECTION (ERD); ION BEAM ANALYSIS (IBA); ISOPROPANOL; NUCLEAR REACTION ANALYSIS (NRA); TAPPING MODE ATOMIC FORCE MICROSCOPY (TMAFM);

SEMICONDUCTING SILICON;

EID: 0030683274     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (37)