Advanced FTIR techniques for photoresist process characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3050, Issue , 1997, Pages 545-556

  Carpio, Ronald A ^a   Byers, Jeff D ^a   Petersen, John S ^a   Theiss, Wolfgang ^b  

^a SEMATECH   (United States)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

DUV; FTIR; Glass transition temperature measurement; i line; Reaction kinetics; Resist; Thickness measurement

Indexed keywords

ACCESSORIES; AMPLIFICATION; ASSOCIATION REACTIONS; ELECTRON BEAM LITHOGRAPHY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; FREE RADICAL POLYMERIZATION; GLASS; MEASUREMENTS; PHOTORESISTORS; PHOTORESISTS; PROCESS CONTROL; REACTION KINETICS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; SPECTRUM ANALYZERS; SUPERCONDUCTING TRANSITION TEMPERATURE; SURFACE TREATMENT; TEMPERATURE MEASUREMENT; THICKNESS GAGES; THICKNESS MEASUREMENT;

DUV; FTIR; GLASS TRANSITION TEMPERATURE MEASUREMENT; I-LINE; RESIST;

GLASS TRANSITION;

EID: 0010363842     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.275946     Document Type: Conference Paper

References (14)

1. A. Iturraalde, Proc. SPIE 2637, 91-101 (1995).
2. T. R. Pampalone, A. M. Gilfillan, and R. J. Zanzucchi, J. Electrochem. Soc. 133, 1917-1922 (1986).
3. B. Gogolides, E. Tegou, K. Beltsios, K. Papadokostaki, M. Hatzakis, Microelectro. Eng. 30, 267 (1996).
4. G.M. Wallraff, J. Opitz, G. Breyta, H. Ito, and B. Fuller, Proc. SPIE 2724, 149-155 (1996).
5. SCOUT: SpectrosCopic Objects and UTilities, a Windows-based program for optical analysis, written by one of the authors (W.Theiss).
6. R.Brendel, D.Bormann, J. Appl. Phys. 71, 1 (1992).
7. J. N. Hilfiker and R. A. Synowicki, Solid State Technology, October, 157-167 (1996).
8. C. J. Gamsky, P. M. Dentinger, G. R. Howes, and J. W. Taylor, Proc. SPIE 2438, 143-152 (1995).
9. c. A. Mack, D. P. DeWitt, B. K. Tsai, and G. Yetter, Proc. SPIE 2195, 584-595 (1994).
10. R.A. Ferguson, J.M. Hutchinson, C.A. Spense, and A.R. Neureuther, J. Vac. Sci. Technol. B 8, 1423 (1990).
11. H. Ito, G. Breyta, W. Conley, P Hagerty, J. Thackeray, S. Holmes, R. Nunes, D. Fenzel-Alexander, R. Dipietro, D. Hofer, J. of Photopolymer Sci. and Technol. 9, 557-572 (1996).
12. Y. Yamashita, T. Taguchi, T. Watanabe, Proc. SPIE 2438, 617-625 (1995).
13. J.S. Petersen, J. Byers, and R. Carpio, International Conference on Micro- and Nano-Engineering, University of Glasgow, Scotland, 1996.
14. K. Yamamoto and H. Ishida, Vibrational Spectroscopy, 8, 1-36 (1994).