A novel approach for the determination of the actual incidence angle in a magnetic-sector SIMS Instrument

Surface and Interface Analysis

Volumn 25, Issue 10, 1997, Pages 817-822

  Jiang, Zhi Xiong ^a   Alkemade, Paul F A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Grazing incidence; High depth resolution; Incidence angle; Magnetic sector SIMS

Indexed keywords

ION BEAMS; IONIZATION; SPUTTERING; SURFACES;

GRAZING INCIDENCE; INCIDENCE ANGLE;

SECONDARY ION MASS SPECTROMETRY;

EID: 0031233587     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199709)25:10<817::AID-SIA305>3.0.CO;2-O     Document Type: Article

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