Improved theoretical reflectivities of extreme ultraviolet mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 412-419

  Singh, Mandeep ^a   Braat, Joseph J M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BERYLLIUM; MIRRORS; MOLYBDENUM; OPTICAL FILMS; OPTICAL MULTILAYERS; REFRACTIVE INDEX; SILICON; THIN FILMS; ULTRAVIOLET RADIATION;

DISTRIBUTED BRAGG REFLECTORS (DBR); EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL);

PHOTOLITHOGRAPHY;

EID: 0033701341     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)