On a Bi-directional Driving Electrostatic Actuator

IEEJ Transactions on Sensors and Micromachines

Volumn 117, Issue 12, 1997, Pages 633-636

  Nakamura, Shigeo ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85010105965     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.117.633     Document Type: Article

References (5)

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2. S. Nakamura and H. Fnjita : “An Electrostatic Micro Actuator for a Magnetic Head Tracking System of Hard Disk Drives”, Proc. of the 3rd France-Japan / 1st Europe-Asia Congress on Mechatronics, Besancon, France, 2, p778 (1996,11)
3. D. A. Horsley, A. Singth, A. P. Pisano and R. Horowitz : “Angular Micropositioner for Disk Drives ”, Proc. of IEEE the 10th Annual Int. Workshop on MEMS, Nagoya, p216 (1997,1).
4. E. Oilier, P. Labeye and F. Revol : “A Micro-opt-mechanical Switch Integrated on Silicon for Optical Fiber Network”, DIGEST IEEE/LEOS 1996 Summer Topical Meetings, Keystone, U. S. A., p71 (1996,8)
5. L-. S. Fan, H. H. Ottesen, T. C. Reiley and W. Wood : “Magnetic Recording Head Positioning at Very High Track Densities Using a Microactuator-Based, Two-Stage Servo System”, IEEE Trans, on Industrial Eng., 42-3, p222 (1995,6)