Backside-illuminated photoelectrochemical etching for the fabrication of deeply undercut GaN structures

Applied Physics Letters

Volumn 77, Issue 16, 2000, Pages 2610-2612

  Stonas, A R ^a   Kozodoy, P ^a   Marchand, H ^a   Fini, P ^a   DenBaars, S P ^a   Mishra, U K ^a   Hu, E L ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001051542     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1318726     Document Type: Article

References (8)

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