Large-area high-density plasma excitation using standing pure and hybrid surface waves

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1537-1541

  Ghanashev, I ^a   Nagatsu, M ^a   Morita, S ^a   Sugai, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHAMBER WALLS; DIELECTRIC PLATES; DIELECTRIC REGIONS; DISTRIBUTION MEASUREMENT; EIGEN MODES; EIGENMODE ANALYSIS; ELECTRON DENSITIES; FLAT SURFACES; HIGH DENSITY; HIGH DENSITY PLASMAS; HYBRID SURFACE; LARGE-DIAMETER; LOW PRESSURES; LOWER DENSITY; LOWER PRESSURES; MICROWAVE DISCHARGE; MODE NUMBER; NEW SOURCES; ORDER OF MAGNITUDE; PLASMA DENSITY DISTRIBUTIONS; PLASMA PROCESSING; REACTIVE GAS; STANDING SURFACE WAVES; SURFACE MODES;

ANTENNA ARRAYS; CARRIER CONCENTRATION; ELECTRON DENSITY MEASUREMENT; ELECTRONS; INDUCTIVELY COUPLED PLASMA; INERT GASES; MICROWAVES; PLASMA DENSITY; PLASMA ETCHING; PLATE METAL; REFLECTIVE COATINGS; SLOT ANTENNAS; SURFACE WAVES; WATER WAVES;

ELECTRIC DISCHARGES;

EID: 75149196766     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581183     Document Type: Article

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