PECVD of amorphous hydrogenated oxygenated nitrogenated carbon films

Journal of Polymer Science, Part B: Polymer Physics

Volumn 36, Issue 11, 1998, Pages 1881-1888

  Durrant, Steven F ^a   Bica De Moraes, Mário A ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Actinometric optical emission spectrometry; Nitrogenated plasma polymers; Plasma surface interactions

Indexed keywords

ALCOHOLS; CARBON; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; INFRARED SPECTROSCOPY; NITROGEN; PLASMAS; REFRACTIVE INDEX; SURFACE PHENOMENA; ULTRAVIOLET SPECTROSCOPY;

ACTINOMETRIC OPTICAL EMISSION SPECTROSCOPY (AOES); ISOPROPANOL; NITROGENATION;

AMORPHOUS FILMS;

EID: 0000984167     PISSN: 08876266     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0488(199808)36:11<1881::AID-POLB9>3.0.CO;2-T     Document Type: Article

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