Thermal Ta2O5 films as a gate insulator for thin film capacitors

International Journal of Electronics

Volumn 84, Issue 5, 1998, Pages 453-466

  Spassov, D ^a   Atanassova, E ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000898901     PISSN: 00207217     EISSN: 13623060     Source Type: Journal    
DOI: 10.1080/002072198134562     Document Type: Article

References (39)

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