메뉴 건너뛰기




Volumn 40, Issue 28, 2001, Pages 4933-4939

Depolarization and principal Mueller matrix measured by null ellipsometry

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; LIGHT POLARIZATION; MATRIX ALGEBRA; SAPPHIRE;

EID: 0000851670     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.004933     Document Type: Article
Times cited : (26)

References (31)
  • 1
    • 0001561491 scopus 로고    scopus 로고
    • Error analysis of null ellipsometry with depolarization
    • S.-M. F. Nee, “Error analysis of null ellipsometry with depolarization,” Appl. Opt. 38, 5388-5398 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 5388-5398
    • Nee, S.-M.F.1
  • 2
    • 0032001221 scopus 로고    scopus 로고
    • Effects of depolarization of optical components on null ellipsometry
    • S.-M. F. Nee and Teresa Cole, “Effects of depolarization of optical components on null ellipsometry,” Thin Solid Films 313-314, 90-96 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 90-96
    • Nee, S.-M.F.1    Cole, T.2
  • 3
    • 0026960616 scopus 로고
    • The effects of incoherent scattering on ellipsometry
    • D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE
    • S.-M. F. Nee, “The effects of incoherent scattering on ellipsometry,” in Polarization Analysis and Measurement, D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE 1746, 119-127 (1992).
    • (1992) Polarization Analysis and Measurement , vol.1746 , pp. 119-127
    • Nee, S.-M.F.1
  • 4
    • 0026986290 scopus 로고
    • Birefringence characterization using transmission ellipsometry
    • D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE
    • S.-M. F. Nee, “Birefringence characterization using transmission ellipsometry,” in Polarization Analysis and Measurement, D. H. Goldstein and R. A. Chipman, eds., Proc. SPIE 1746, 269 -280 (1992).
    • (1992) Polarization Analysis and Measurement , vol.1746
    • Nee, S.-M.F.1
  • 5
    • 0001077335 scopus 로고    scopus 로고
    • Depolarization and retardation of a birefrein-gent slab
    • S.-M. F. Nee, “Depolarization and retardation of a birefrein-gent slab,” J. Opt. Soc. Am. A 17, 2067-2073 (2000).
    • (2000) J. Opt. Soc. Am. A , vol.17 , pp. 2067-2073
    • Nee, S.-M.F.1
  • 6
    • 0000173368 scopus 로고    scopus 로고
    • Polarization of specular reflection and nearspecular scattering by a rough surface
    • S.-M. F. Nee, “Polarization of specular reflection and nearspecular scattering by a rough surface,” Appl. Opt. 35, 3570-3582 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 3570-3582
    • Nee, S.-M.F.1
  • 7
    • 0028758289 scopus 로고
    • Effects of near-specular scattering on polarim-etry
    • D. H. Goldstein and David B. Chenault, eds., Proc. SPIE
    • S.-M. F. Nee, “Effects of near-specular scattering on polarim-etry,” in Polarization Analysis and Measurement II, D. H. Goldstein and David B. Chenault, eds., Proc. SPIE 2265, 304-313 (1994).
    • (1994) Polarization Analysis and Measurement II , vol.2265 , pp. 304-313
    • Nee, S.-M.F.1
  • 8
    • 0037934959 scopus 로고
    • Interstellar polarization in an irregularly fluctuating medium
    • S. F. Nee and J. R. Jokipii, “Interstellar polarization in an irregularly fluctuating medium,” Astrophys. J. 234, 140-153 (1979).
    • (1979) Astrophys. J. , vol.234 , pp. 140-153
    • Nee, S.F.1    Jokipii, J.R.2
  • 9
    • 0037597076 scopus 로고
    • Fluctuation theory of starlight polarization
    • S. F. Nee, “Fluctuation theory of starlight polarization,” Astrophys. J. 237, 471-481 (1980).
    • (1980) Astrophys. J. , vol.237 , pp. 471-481
    • Nee, S.F.1
  • 10
    • 0019597239 scopus 로고
    • Relationships between elements of the Stokes matrix
    • E. S. Fry and G. W. Kattawar, “Relationships between elements of the Stokes matrix,” Appl. Opt. 20, 2811-2814 (1981).
    • (1981) Appl. Opt. , vol.20 , pp. 2811-2814
    • Fry, E.S.1    Kattawar, G.W.2
  • 11
    • 84975576423 scopus 로고
    • Relationship between Jones and Mueller matrices for random media
    • K. Kim, L. Mandel, and E. Wolf, “Relationship between Jones and Mueller matrices for random media,” J. Opt. Soc. Am. A 4, 433-437 (1987).
    • (1987) J. Opt. Soc. Am. A , vol.4 , pp. 433-437
    • Kim, K.1    Mandel, L.2    Wolf, E.3
  • 12
    • 84904731600 scopus 로고
    • Problem of polarization degree in spectroscopic photometric ellipsometry (Polarimetry)
    • A. Roseler, “Problem of polarization degree in spectroscopic photometric ellipsometry (polarimetry),” J. Opt. Soc. Am. A 9, 1124-1131 (1992).
    • (1992) J. Opt. Soc. Am. A , vol.9 , pp. 1124-1131
    • Roseler, A.1
  • 13
    • 0000092297 scopus 로고    scopus 로고
    • Emission polarization of roughened glass and aluminum surfaces
    • D. L. Jordan, G. D. Lewis, and E. Jakeman, “Emission polarization of roughened glass and aluminum surfaces,” Appl. Opt. 35, 3583-3590 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 3583-3590
    • Jordan, D.L.1    Lewis, G.D.2    Jakeman, E.3
  • 14
    • 0005807653 scopus 로고    scopus 로고
    • Influence of incoherent superposition of light on ellipsometric coefficients
    • R. Joerger, K. Forcht, A. Gombert, M. Kohl, and W. Graf, “Influence of incoherent superposition of light on ellipsometric coefficients,” Appl. Opt. 36, 319-327 (1997).
    • (1997) Appl. Opt. , vol.36 , pp. 319-327
    • Joerger, R.1    Forcht, K.2    Gombert, A.3    Kohl, M.4    Graf, W.5
  • 15
    • 0005814730 scopus 로고    scopus 로고
    • Realtime control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model
    • M. Kildemo, P. Bulkin, B. Drevillon, and O. Hunderi, “Realtime control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model,” Appl. Opt. 36, 6352-6359 (1997).
    • (1997) Appl. Opt. , vol.36 , pp. 6352-6359
    • Kildemo, M.1    Bulkin, P.2    Drevillon, B.3    Hunderi, O.4
  • 16
    • 0003364304 scopus 로고    scopus 로고
    • Polarization measurement
    • J. G. Webster, ed.CRC Press, Boca Raton, Fla, Chap
    • S.-M. F. Nee, “Polarization measurement,” in The Measurement, Instrumentation and Sensors Handbook, J. G. Webster, ed. (CRC Press, Boca Raton, Fla., 1999), Chap. 60.
    • (1999) The Measurement, Instrumentation and Sensors Handbook , pp. 60
    • Nee, S.-M.F.1
  • 18
    • 0000973619 scopus 로고
    • Polarimetry
    • McGraw-Hill, New York
    • R. A. Chipman, “Polarimetry,” in Handbook of Optics (McGraw-Hill, New York, 1995), Vol. II, Chap. 22.
    • (1995) Handbook of Optics , vol.2 , pp. 22
    • Chipman, R.A.1
  • 20
    • 0009326153 scopus 로고
    • Time resolved ellip-sometry
    • G. E. Jellison, Jr., and D. H. Lowndes, “Time resolved ellip-sometry,” Appl. Opt. 24, 2948-2955 (1985).
    • (1985) Appl. Opt , vol.24 , pp. 2948-2955
    • Jellison, G.E.1    Lowndes, D.H.2
  • 21
    • 0000228743 scopus 로고
    • Sample depolarization effects from thin films of ZnS on GaAs as measured by spectroscopic ellipsometry
    • G. E. Jellison, Jr., and J. W. McCamy, “Sample depolarization effects from thin films of ZnS on GaAs as measured by spectroscopic ellipsometry,” Appl. Phys. Lett. 61, 512-514 (1992).
    • (1992) Appl. Phys. Lett , vol.61 , pp. 512-514
    • Jellison, G.E.1    Mc Camy, J.W.2
  • 22
    • 0032000202 scopus 로고    scopus 로고
    • Depolarization/mixed polarization corrections of ellipsometry spectra
    • U. Rossow, “Depolarization/mixed polarization corrections of ellipsometry spectra,” Thin Solid Films 313-314, 97-101 (1998).
    • (1998) Thin Solid Films , vol.313-314 , pp. 97-101
    • Rossow, U.1
  • 23
    • 0031646671 scopus 로고    scopus 로고
    • Characterization of imperfect polarizers under imperfect conditions
    • S. F. Nee, C. Yoo, T. Cole, and D. Burge, “Characterization of imperfect polarizers under imperfect conditions,” Appl. Opt. 37, 57-64 (1998).
    • (1998) Appl. Opt. , vol.37 , pp. 57-64
    • Nee, S.F.1    Yoo, C.2    Cole, T.3    Burge, D.4
  • 24
    • 0032224227 scopus 로고    scopus 로고
    • Polarization of scattering by rough surfaces
    • Z. Gu and A. A. Maradudin, eds., Proc. SPIE
    • S.-M. F. Nee and T.-W. Nee, “Polarization of scattering by rough surfaces,” in Conference of Scattering and Surface Roughness II, Z. Gu and A. A. Maradudin, eds., Proc. SPIE 3426, 169-180 (1998).
    • (1998) Conference of Scattering and Surface Roughness II , vol.3426 , pp. 169-180
    • Nee, S.-M.F.1    Nee, T.-W.2
  • 25
    • 0031289030 scopus 로고    scopus 로고
    • Characterization of infrared polarizers
    • D. H. Goldstein and D. B. Chenault, eds., Proc. SPIE
    • S. F. Nee, T. Cole, C. Yoo, and D. Burge, “Characterization of infrared polarizers,” in Polarization: Measurement, Analysis, and Remote Sensing, D. H. Goldstein and D. B. Chenault, eds., Proc. SPIE 3121, 213-224 (1997).
    • (1997) Polarization: Measurement, Analysis, and Remote Sensing , vol.3121 , pp. 213-224
    • Nee, S.F.1    Cole, T.2    Yoo, C.3    Burge, D.4
  • 26
    • 84975609171 scopus 로고
    • Error analysis of a Mueller matrix polarimenter
    • D. H. Goldstein and R. A. Chipman, “Error analysis of a Mueller matrix polarimenter,” J. Opt. Soc. Am. A 7, 693-700 (1990).
    • (1990) J. Opt. Soc. Am. A , vol.7 , pp. 693-700
    • Goldstein, D.H.1    Chipman, R.A.2
  • 27
    • 0015145333 scopus 로고
    • Ellipsometry with imperfect components including incoherent effects
    • R. M. A. Azzam and N. M. Bashara, “Ellipsometry with imperfect components including incoherent effects,” J. Opt. Soc. Am. 61, 1380-1391 (1971).
    • (1971) J. Opt. Soc. Am. , vol.61 , pp. 1380-1391
    • Azzam, R.M.A.1    Bashara, N.M.2
  • 28
    • 84975594853 scopus 로고
    • Error reduction for a serious compensator imperfection for null ellipsometry
    • S.-M. F. Nee, “Error reduction for a serious compensator imperfection for null ellipsometry,” J. Opt. Soc. Am. A 8, 314-321 (1991).
    • (1991) J. Opt. Soc. Am. A , vol.8 , pp. 314-321
    • Nee, S.-M.F.1
  • 29
    • 0005284249 scopus 로고
    • The influences of roughness on film thickness measurements by Mueller materix ellipsom-etry
    • D. A. Ramsey and K. C. Ludema, “The influences of roughness on film thickness measurements by Mueller materix ellipsom-etry,” Rev. Sci. Instrum. 65, 2874 -2881 (1994).
    • (1994) Rev. Sci. Instrum , vol.65
    • Ramsey, D.A.1    Ludema, K.C.2
  • 30
    • 0017983141 scopus 로고
    • Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal
    • R. M. A. Azzam, “Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal,” Opt. Lett. 2, 148-150 (1978).
    • (1978) Opt. Lett. , vol.2 , pp. 148-150
    • Azzam, R.M.A.1
  • 31
    • 0000416476 scopus 로고
    • Mueller matrix dual-rotating retarder polarimeter
    • D. H. Goldstein, “Mueller matrix dual-rotating retarder polarimeter,” Appl. Opt. 31, 6676- 6683 (1992).
    • (1992) Appl. Opt , vol.31
    • Goldstein, D.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.