SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1568-1574

X-ray scattering analysis of interface roughness and diffusion

(1) Baribeau, J M a

a NATIONAL RESEARCH COUNCIL CANADA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000826036 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.589941 Document Type: Article

Times cited : (19)

References (36)

1
- 0026413353
- T. Noda, M. Tanaka, and H. Sakaki, J. Cryst. Growth 111, 348 (1991).
- (1991) J. Cryst. Growth , vol.111 , pp. 348
- Noda, T.¹ Tanaka, M.² Sakaki, H.³

2
- 0001279324
- Y. H. Xie, D. Monroe, E. A. Fitzgerald, P. J. Silverman, F. A. Thiel, and G. P. Watson, Appl. Phys. Lett. 63, 2263 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2263
- Xie, Y.H.¹ Monroe, D.² Fitzgerald, E.A.³ Silverman, P.J.⁴ Thiel, F.A.⁵ Watson, G.P.⁶

3
- 36549102148
- J.-M. Baribeau, T. E. Jackman, D. C. Houghton, P. Maigné, and M. W. Denhoff, J. Appl. Phys. 63, 5738 (1988).
- (1988) J. Appl. Phys. , vol.63 , pp. 5738
- Baribeau, J.-M.¹ Jackman, T.E.² Houghton, D.C.³ Maigné, P.⁴ Denhoff, M.W.⁵

4
- 0024902570
- J.-M. Baribeau, D. J. Lockwood, M. W. C. Dharma-wardana, N. L. Rowell, and J. P. McCaffrey, Thin Solid Films 183, 17 (1989).
- (1989) Thin Solid Films , vol.183 , pp. 17
- Baribeau, J.-M.¹ Lockwood, D.J.² Dharma-wardana, M.W.C.³ Rowell, N.L.⁴ McCaffrey, J.P.⁵

5
- 0029633693
- J.-M. Baribeau, J. Cryst. Growth 157, 52 (1995).
- (1995) J. Cryst. Growth , vol.157 , pp. 52
- Baribeau, J.-M.¹

6
- 0001502529
- H. Lafontaine, D. C. Houghton, D. Elliott, N. L. Rowell, J.-M. Baribeau, S. Laframboise, G. I. Sproule, and S. J. Rolfe, J. Vac. Sci. Technol. A 14, 1675 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 1675
- Lafontaine, H.¹ Houghton, D.C.² Elliott, D.³ Rowell, N.L.⁴ Baribeau, J.-M.⁵ Laframboise, S.⁶ Sproule, G.I.⁷ Rolfe, S.J.⁸

7
- 0000796466
- S. Takagi. Acta Crystallogr. 15, 1311 (1962).
- (1962) Acta Crystallogr. , vol.15 , pp. 1311
- Takagi, S.¹

8
- 0001457411
- D. Taupin, Bull. Soc. Fr. Mineral. Cristallogr. 87, 469 (1964).
- (1964) Bull. Soc. Fr. Mineral. Cristallogr. , vol.87 , pp. 469
- Taupin, D.¹

9
- 0028749040
- P. Van der Sluis, J. Appl. Crystallogr. 27, 1015 (1994).
- (1994) J. Appl. Crystallogr. , vol.27 , pp. 1015
- Van Der Sluis, P.¹

10
- 26144449160
- L. G. Parratt, Phys. Rev. 95, 359 (1954).
- (1954) Phys. Rev. , vol.95 , pp. 359
- Parratt, L.G.¹

11
- 0001056126
- P. Croce and L. Névot. Rev. Phys. Appl. 11, 113 (1976).
- (1976) Rev. Phys. Appl. , vol.11 , pp. 113
- Croce, P.¹ Névot, L.²

12
- 11744369824
- note
- Simulation of the diffuse scattering performed using BEDE Scientific GIXS calculation package.

13
- 51249188112
- R. J. Asaro and W. A. Tiller, Metall. Trans. A 3, 1789 (1972).
- (1972) Metall. Trans. A , vol.3 , pp. 1789
- Asaro, R.J.¹ Tiller, W.A.²

14
- 0000240718
- M. A. Grinfeld, Sov. Phys. Dokl. 31, 831 (1986).
- (1986) Sov. Phys. Dokl. , vol.31 , pp. 831
- Grinfeld, M.A.¹

15
- 84957349716
- A. G. Cullis, D. J. Robbins, S. J. Barnett, and A. J. Pidduck, J. Vac. Sci. Technol. A 12, 1924 (1994).
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1924
- Cullis, A.G.¹ Robbins, D.J.² Barnett, S.J.³ Pidduck, A.J.⁴

16
- 21544441670
- A. Ponchet, A. Rocher, J.-Y. Emery, C. Starck, and L. Goldstein, J. Appl. Phys. 74, 3778 (1993).
- (1993) J. Appl. Phys. , vol.74 , pp. 3778
- Ponchet, A.¹ Rocher, A.² Emery, J.-Y.³ Starck, C.⁴ Goldstein, L.⁵

17
- 0003542751
- edited by E. Kasper INSPEC. The Institution of Electrical Engineers, London
- M. A. Grinfeld and D. J. Srolovitz, Properties of Strained and Relaxed Silicon Germanium, edited by E. Kasper (INSPEC. The Institution of Electrical Engineers, London, 1995), p. 3.
- (1995) Properties of Strained and Relaxed Silicon Germanium , pp. 3
- Grinfeld, M.A.¹ Srolovitz, D.J.²

18
- 0000789226
- A. A. Darhuber, V. Holy, J. Stangi, G. Bauer, V. M. Ustinov, P. S. Kop'ev, A. O. Kosogov, and P. Werner, Appl. Phys. Lett. 70, 955 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 955
- Darhuber, A.A.¹ Holy, V.² Stangi, J.³ Bauer, G.⁴ Ustinov, V.M.⁵ Kop'ev, P.S.⁶ Kosogov, A.O.⁷ Werner, P.⁸

19
- 33744991462
- S. K. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley, Phys. Rev. B 38, 2297 (1988): S. K. Sinha, Physica B 173, 25 (1991).
- (1988) Phys. Rev. B , vol.38 , pp. 2297
- Sinha, S.K.¹ Sirota, E.B.² Garoff, S.³ Stanley, H.B.⁴

20
- 0026202692
- S. K. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley, Phys. Rev. B 38, 2297 (1988): S. K. Sinha, Physica B 173, 25 (1991).
- (1991) Physica B , vol.173 , pp. 25
- Sinha, S.K.¹

21
- 0030648590
- J.-M. Baribeau, D. J. Lockwood, H.-J. Labbé, and S. J. Rolfe, Mater. Res. Soc. Symp. Proc. 448, 113 (1997).
- (1997) Mater. Res. Soc. Symp. Proc. , vol.448 , pp. 113
- Baribeau, J.-M.¹ Lockwood, D.J.² Labbé, H.-J.³ Rolfe, S.J.⁴

22
- 11644297172
- Chiba, 29 Aug.-1 Sept. unpublished
- N. Ohtani, S. M. Mokler, H. H. Xie, J. Zhang, and B. A. Joyce, International Conference on Solid State Devices and Materials, Chiba, 29 Aug.-1 Sept. 1993 (unpublished), p. 249.
- (1993) International Conference on Solid State Devices and Materials , pp. 249
- Ohtani, N.¹ Mokler, S.M.² Xie, H.H.³ Zhang, J.⁴ Joyce, B.A.⁵

23
- 0012753563
- G. Ohta, S. Fukatsu, Y. Ebuchi, T. Hattori, N. Usami, and Y. Shiraki, Appl. Phys. Lett. 65, 2975 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2975
- Ohta, G.¹ Fukatsu, S.² Ebuchi, Y.³ Hattori, T.⁴ Usami, N.⁵ Shiraki, Y.⁶

24
- 0005929009
- J.-M. Baribeau, D. J. Lockwood, and R. W. G. Syme, J. Appl. Phys. 80, 1450 (1996).
- (1996) J. Appl. Phys. , vol.80 , pp. 1450
- Baribeau, J.-M.¹ Lockwood, D.J.² Syme, R.W.G.³

25
- 21544482195
- P. D. Adams, S. M. Yasilove, and D. J. Eaglesham, Appl. Phys. Lett. 63, 3571 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3571
- Adams, P.D.¹ Yasilove, S.M.² Eaglesham, D.J.³

26
- 0029358835
- M. Li, Q. Cui, S. F. Cui, J. M. Xhou, Z. H. Mai, C. Dong, H. Chen, and F. Wu, J. Appl. Phys. 78, 1681 (1995).
- (1995) J. Appl. Phys. , vol.78 , pp. 1681
- Li, M.¹ Cui, Q.² Cui, S.F.³ Xhou, J.M.⁴ Mai, Z.H.⁵ Dong, C.⁶ Chen, H.⁷ Wu, F.⁸

27
- 0031557608
- S. F. Cui, G. M. Luo, M. Li, Z. H. Mai, Q. Cui, J. M. Zhou, X. M. Jiang, and W. L. Zhang, J. Phys.: Condens. Matter 9, 2891 (1997).
- (1997) J. Phys.: Condens. Matter , vol.9 , pp. 2891
- Cui, S.F.¹ Luo, G.M.² Li, M.³ Mai, Z.H.⁴ Cui, Q.⁵ Zhou, J.M.⁶ Jiang, X.M.⁷ Zhang, W.L.⁸

28
- 0000689515
- P. M. Reiner, J.-H. Li, Y. Yamaguchi, O. Sakata, H. Hashizume, N. Usami, and Y. Shiraki, J. Phys.: Condens. Matter 9, 4521 (1997).
- (1997) J. Phys.: Condens. Matter , vol.9 , pp. 4521
- Reiner, P.M.¹ Li, J.-H.² Yamaguchi, Y.³ Sakata, O.⁴ Hashizume, H.⁵ Usami, N.⁶ Shiraki, Y.⁷

29
- 0006413038
- edited by L. L. Chang and B. C. Giessen Academic, Orlando
- A. L. Greer and F. Spaepen. Diffusion in Synthetic Modulated Structures, edited by L. L. Chang and B. C. Giessen (Academic, Orlando. 1985), p. 419.
- (1985) Diffusion in Synthetic Modulated Structures , pp. 419
- Greer, A.L.¹ Spaepen, F.²

30
- 36549100434
- J.-M. Baribeau, R. Pascual, and S. Saimoto, Appl. Phys. Lett. 57, 1502 (1990).
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1502
- Baribeau, J.-M.¹ Pascual, R.² Saimoto, S.³

31
- 36549091634
- S. J. Chang, K. L. Wang, R. C. Bowman, and P. M. Adams, Appl. Phys. Lett. 54, 1253 (1988).
- (1988) Appl. Phys. Lett. , vol.54 , pp. 1253
- Chang, S.J.¹ Wang, K.L.² Bowman, R.C.³ Adams, P.M.⁴

32
- 36549093871
- S. S. Iyer and F. K. LeGoues, J. Appl. Phys. 65, 4693 (1989).
- (1989) J. Appl. Phys. , vol.65 , pp. 4693
- Iyer, S.S.¹ LeGoues, F.K.²

33
- 0002866551
- W. P. Gillin and D. J. Dunstan, Phys. Rev. B 50, 7495 (1994).
- (1994) Phys. Rev. B , vol.50 , pp. 7495
- Gillin, W.P.¹ Dunstan, D.J.²

34
- 0000333183
- Analytical Techniques for Thin Films
- edited by K. N. Tu and R. Rosenberg, Academic, Boston
- M. Masanori, A. Segmüller, and K.-N. Tu, Analytical Techniques for Thin Films, edited by K. N. Tu and R. Rosenberg, Treatise on Materials Science and Technology, Vol. 27 (Academic, Boston, 1988).
- (1988) Treatise on Materials Science and Technology , vol.27
- Masanori, M.¹ Segmüller, A.² Tu, K.-N.³

35
- 0001238985
- G. L. McVay and A. R. Ducharme, Phys. Rev. B 9, 627 (1974).
- (1974) Phys. Rev. B , vol.9 , pp. 627
- McVay, G.L.¹ Ducharme, A.R.²

36
- 0008086185
- R. Schorer, E. Friess, K. Eberl, and G. Abstreiter, Phys. Rev. B 44, 1772 (1991).
- (1991) Phys. Rev. B , vol.44 , pp. 1772
- Schorer, R.¹ Friess, E.² Eberl, K.³ Abstreiter, G.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.