Interfacial roughness of Si1-xGex/Si multilayer structures on Si(111) probed by x-ray scattering

Journal of Physics Condensed Matter

Volumn 9, Issue 22, 1997, Pages 4521-4533

  Reimer, P M ^a,c   Li, J H ^a,d   Yamaguchi, Y ^a   Sakata, O ^a   Hashizume, H ^a   Usami, N ^b   Shiraki, Y ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c GOSHEN COLLEGE   (United States)

^d INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000689515     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/9/22/005     Document Type: Article

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