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Journal of Organometallic Chemistry

Volumn 616, Issue 1-2, 2000, Pages 128-134

Structural characterization of a dimeric dimethylindium azide and its use as a single-source precursor for InN thin films

(4) Bae, Byoung Jae a Park, Jae E a Kim, Bongsoo a Park, Joon T a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

Azides; Chemical vapour deposition; Indium; Indium nitride; Single source precursors

Indexed keywords

EID: 0000768783 PISSN: 0022328X EISSN: None Source Type: Journal
DOI: 10.1016/S0022-328X(00)00581-7 Document Type: Article

Times cited : (23)

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