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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2734-2744

Development of texture in interconnect thin film stacks

(3) Knorr, D B a Merchant, S M b Biberger, M A c

a LOCKHEED MARTIN (United States)

b NOKIA RESEARCH CENTER (United States)

c NOVELLUS SYSTEMS INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000696558 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.590265 Document Type: Article

Times cited : (25)

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