In situ determination of in-plane strain anisotropy in ZnSe(001 )/GaAs layers using reflectance difference spectroscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2342-2349

  Hingerl, K ^a   Yasuda, T ^b   Hanada, T ^b,c   Miwa, S ^b   Kimura, K ^b   Ohtake, A ^b   Yao, T ^b,c  

^a PROFACTOR GMBH   (Austria)

^b JT RES CENTER FOR ATOM TECHNOLOGY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000604557     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590172     Document Type: Article

References (20)

1. T. Yasuda, L. H. Kuo, K. Kimura, S. Miwa, C. G. Jin, K. Tanaka, and T. Yao, J. Vac. Sci. Technol. B 14, 3052 (1996).
2. T. Yasuda, K. Kimura, S. Miwa, L. H. Kuo, C. G. Jin, K. Tanaka, and T. Yao, Phys. Rev. Lett. 77, 326 (1996), and references therein.
3. J. Petruzello, B. L. Greenberg, D. A. Cammack, and R. Dalby, J. Appl. Phys. 63, 2299 (1988).
4. A. Ishibashi, J. Cryst. Growth 159, 555 (1996).
5. Z. Yang, I. K. Sou, Y. H. Yeung, and G. K. L. Wong, Appl. Phys. Lett. 66, 2235 (1996).
6. Z. Yang, I. K. Sou, Y. H. Yeung, and G. K. L. Wong, J. Vac. Sci. Technol. B 14, 2973 (1996).
7. R. Dahmani, L. Salamanca-Riba, N. V. Ngyuen, D. Chandler-Horowitz, and B. T. Jonker, Appl. Phys. Lett. 64, 3620 (1994).
8. D. E. Aspnes, J. P. Harbison, A. A. Studna, and L. T. Florez, J. Vac. Sci. Technol. A 6, 1327 (1988).
9. L. H. Kuo, K. Kimura, A. Ohtake, S. Miwa, T. Yasuda, and T. Yao, J. Vac. Sci. Technol. B 15, 1241 (1997).
10. F. H. Pollak and M. Cardona, Phys. Rev. 172, 816 (1968).
11. D. G. Thomas, J. Appl. Phys. 32, S2298 (1961).
12. Fundamentals of Semiconductors, edited by P. Y. Yu and M. Cardona, ISBN 3-540-61461-3.
13. Landolt Börnstein Series 17b, edited by Gumlich (Theis, Tschierse), p. 144.
14. T. Yasuda, Thin Solid Films (in press).
15. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Amsterdam, Amsterdam, 1977).
16. T. Yasuda (unpublished).
17. J. Eymery, B. Daudin, D. Brun-Le Cunff, and N. Boudet, Appl. Phys. Lett. 66, 3456 (1996).
18. D. E. Aspnes, J. Opt. Soc. Am. 70, 1275 (1980).
19. J. Tersoff, Phys. Rev. Lett. 76, 1675 (1996); Phys. Rev. B 53, 16334 (1996).
20. J. Tersoff, Phys. Rev. Lett. 76, 1675 (1996); Phys. Rev. B 53, 16334 (1996).