One-chip integrated resonance circuit with a capacitive pressure sensor

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 173-178

  Husák, Miroslav ^a  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; INTEGRATED CIRCUITS; PRESSURE TRANSDUCERS; SEMICONDUCTING SILICON;

CAPACITIVE PRESSURE SENSORS;

CIRCUIT RESONANCE;

EID: 0031223153     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/025     Document Type: Article

References (6)

1. Husák M 1993 Sensor Systems Lecture notes, CTU, Prague
2. Backlund Y, Rosengren L, Hok B and Svedbergh B 1990 Passive silicon transsensor intended for biomedical remote pressure monitoring Sen. Actuators A 21-3 58-61
3. Ko W H, Bao M H and Hong Y D 1982 A high-sensitivity integrated circuit capacitive pressure transducer IEEE Trans. Electron Devices 29 (1) 48-55
4. Clark S K and Wise K D 1979 Pressure sensitivity in anisotropically etched thin diaphragm pressure sensor IEEE Trans. Electron. Devices 26 (12) 1887-96
5. Adamčík I 1992 Microelectronic Structures and Technologies Lecture notes, CTU, Prague (in Czech)
6. Klabal J 1988 We construct a simple receivers VHF (Prague: Svazarm) (in Czech)