Theory of feature broadening in direct-write optical lithography

Journal of Applied Physics

Volumn 88, Issue 6, 2000, Pages 3316-3322

  Bradley, R Mark ^a   Eschmann, Andrea ^a,b   Lee, Siu Au ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

^b METROPOLITAN STATE UNIVERSITY OF DENVER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000460823     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1289475     Document Type: Article

References (29)

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