Reaction of Co and capping layers and its effect on CoSi2 formation in Si/SiOx/Co system

Applied Physics Letters

Volumn 77, Issue 10, 2000, Pages 1443-1445

  Kim, Gi Bum ^a   Kwak, Joon Seop ^a   Baik, Hong Koo ^a   Lee, Sung Man ^b   Oh, Sang Ho ^c   Park, Chan Gyung ^c  

^a Yonsei University   (South Korea)

^b Kangwon National University   (South Korea)

^c Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000430785     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1290689     Document Type: Article

References (16)

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