Oxide mediated epitaxy of CoSi2 on silicon

Applied Physics Letters

Volumn 68, Issue 24, 1996, Pages 3461-3463

  Tung, R T ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001602280     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115793     Document Type: Article

References (14)

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