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Volumn 57, Issue 12, 1998, Pages 7292-7298

Formation and healing of defects at the surface under low-energy ion bombardment

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000383723     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.57.7292     Document Type: Article
Times cited : (15)

References (26)
  • 1
    • 85037880007 scopus 로고    scopus 로고
    • S. M. Sze, VLSI Technology (McGraw-Hill, New York 1983).
    • Sze, S.1
  • 26
    • 0003752338 scopus 로고
    • Cambridge University Press, Cambridge
    • A. Zangwill, Physics At Surfaces (Cambridge University Press, Cambridge, 1988).
    • (1988) Physics At Surfaces
    • Zangwill, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.