Stress measurements in sub-μm Si structures using raman spectroscopy

Solid State Phenomena

Volumn 63-64, Issue , 1998, Pages 519-524

  Dombrowski, K F ^a   De Wolf, I ^b  

^a IHP   (Germany)

^b IMEC   (Belgium)

Author keywords

Mechanical Stress; Raman Spectroscopy; Silicon

Indexed keywords

NONDESTRUCTIVE EXAMINATION; RAMAN SPECTROSCOPY; STRESS ANALYSIS;

SUBMICROMETER SILICON STRUCTURES;

SILICON WAFERS;

EID: 0032305857     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.63-64.519     Document Type: Article

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