Modern trends in microstructures and integrated optics for communication, sensing, and actuation

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1307-1318

  Tabib Azar, Massood ^a   Beheim, Glenn ^b  

^a Case Western Reserve University   (United States)

^b NASA GLENN RESEARCH CENTER   (United States)

Author keywords

Actuation; Communication; Micro opto electro mechanical systems; Microstructures; Sensing

Indexed keywords

EID: 0000118914     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601331     Document Type: Article

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