All-silicon waveguides and bulk-etched alignment structures on (110) silicon for integrated micro-opto-mechanical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2686, Issue , 1996, Pages 17-28

  Smith, Steven W ^a   Mehregany, Mehran ^a   Merat, Francis L ^a   Smith, David A ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO-OPTO-MECHANICAL SYSTEMS; REACTIVE ION ETCHING; RIB WAVEGUIDES; U-GROOVES;

ALIGNMENT; ETCHING; FABRICATION; MICROELECTRONICS; ROUGHNESS MEASUREMENT; SEMICONDUCTING SILICON; SUBSTRATES; SURFACES; ULTRASONIC APPLICATIONS;

OPTICAL WAVEGUIDES;

EID: 0029721841     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)