Integrated optic devices using micromachined metal membranes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2686, Issue , 1996, Pages 54-63

  Magel, Gregory A ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRAGG FILTERS; ELECTROSTATIC ACTUATION;

ELECTROSTATICS; MEMBRANES; METALS; MICROMACHINING; OPTICAL FILTERS; OPTICAL SWITCHES; OPTICAL WAVEGUIDES; SEMICONDUCTING SILICON; SUBSTRATES;

INTEGRATED OPTICS;

EID: 0029698791     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)