Silicon integrated optic devices and micromechanical sensors based on ARROW

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2686, Issue , 1996, Pages 2-16

  Nathan, Arokia ^a   Benaissa, Kamel ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; DESIGN; FABRICATION; INTEGRATED CIRCUITS; INTERFEROMETERS; MICROMACHINING; MODULATORS; OPTICAL SENSORS; SEMICONDUCTING SILICON;

ANTIRESONANCE REFLECTION; MICROMECHANICAL SENSORS; THERMOOPTIC MODULATORS;

INTEGRATED OPTICS;

EID: 0029724443     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (44)