Theoretical analysis of deformed optical waveguides used in pressure and displacement sensors

Optical Engineering

Volumn 35, Issue 3, 1996, Pages 870-881

  Wu, Meng Jen John ^a   Tabib Azar, Massood ^b  

^a Allen Bradley Company   (United States)

^b Case Western Reserve University   (United States)

Author keywords

Elasto optic; Integrated optics; Sensors; Waveguides

Indexed keywords

EID: 0009551534     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601013     Document Type: Article

References (33)

1. M. E. Motamedi, "Micro-opto-electro-mechanical systems," Opt. Eng. 33(1), 3505-3517 (1994).
2. A. Garcia and M. Tabib-Azar, "Comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors," Proc. SPIE 2291, 125-142 (1994).
3. M. Tabib-Azar and A. Garcia, "Sensing means and sensor shell: a new method of comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors," Sens. Actuat. A Phys. 48(2), 87-100 (1995).
4. J. Wu and M. Tabib-Azar, "Novel integrated optical structures for sensing application," Proc. SPIE 2291, 149-168 (1994).
5. M. Tabib-Azar, Integrated Optics, Microstructure and Sensors, Kluwer Academic (in press).
6. M. Tabib-Azar and D. Polla, Eds., Integrated Optics and Microstructures, I & II, Proc. SPIE 1793 (1993).
7. M. Tabib-Azar and D. Polla, Eds., Integrated Optics and Microstructures, I & II, Proc. SPIE 2291 (1994).
8. P. Pliska and W. Lukosz, "Integrated-optical acoustical sensors," Sens. Actuat. A41-A42, 93-97 (1994).
9. M. Ohkawa, M. Izutsu, and T. Sueta, "Integrated optic pressure sensor on silicon substrate," Appl. Opt. 28, 5153-5157 (1989).
10. K. Seibert, D. Largeau, B. Bonvalot, D. T. Angelidis and P. Parsons, "Optical system for pressure and temperature sensing," Sens. Actuat. A43, 85-91 (1994).
11. M. Hoffmann, H. Bezzaoui, and E. Voges, "Micromechanical cantilever resonators with integrated optical," Sens. Actuat. A44, 71-75 (1994).
12. W. Lukosz, "Integrated optical nanomechanical devices as modulators, switches, and tunable frequency filters, and as acoustical sensors," SPIE 1793, 214-234 (1992).
13. W. Lukosz and P. Pliska, "Nanomechano-grating-coupler-modulator and integrated optical microphone," Proc. SPIE 1141, 201-207 (1989).
14. A. M. Young, C. Xu, W. Huang, and S. D. Senturia, "Design and analysis of an ARROW-waveguide-based silicon pressure transducer," Proc. SPIE 1793, 42-53 (1992).
15. H. Nishihara, M. Haruna, and T. Suhara, Optical Integrated Circuits, McGraw-Hill, New York (1989).
16. K. Chang, Ed., Handbook of Microwave and Optical Components, Vol. 4, John Wiley & Sons, New York (1991).
17. C. D. Butter and G. B. Hocker, "Fiber optics strain gauge," Appl. Opt. 18, 2867-2869 (1978).
18. D. Marcuse, "Coupled-mode theory for anisotropic optical waveguides," Bell Syst. J. 54, 985-995 (1975).
19. E. A. J. Marcatili, "Improved coupled-mode equations for dielectric guides," IEEE J. Quantum Electron. QE-22, 988-993 (1986).
20. A. Snyder and J. Love. Optical Waveguide Theory. Chapman and Hall (1983).
21. D. Marcuse, Theory of Dielectric Optical Waveguides, 2nd ed., Academic Press, New York (1991).
22. A. Vadekar, W. P. Huang, and A. Nathan, "An integrated silicon micromechanical interferometer," in Proc. 8th Optical Fiber Sensors Conference, pp. 233-236, IEEE 92CH3107-0 (1992).
23. G. B. Kocker, "Fiber-optic sensing of pressure and temperature," Appl. Opt. 18, 1445-1448 (1979).
24. P. O'Neal, Advanced Engineering Mathematics, Wadsworth Publishing (1991).
25. J. Xu and R. Stroud, Acoustic-Optic Devices: Principles, Design, and Applications, John Wiley & Sons, New York (1991).
26. N. Lagakos, A. Dandridge, J. H. Cole, A. B. Tveten, and J. A. Bucaro, "Ultrasonic Acoustic Sensing," Proc. SPIE 798, 94-101 (1987).
27. W. C. Young, Roark's Formulas for Stress and Strain, McGraw-Hill, New York (1989).
28. S. Valette, S. Renard, J. P. Jadot, P. Gidon, and C. Erbeia, "Silicon-based integrated optics technology for optical sensor applications," Sens. Acuat. A21-A23, 1087-1091 (1990).
29. D. Peters, K. Fischer, and J. Müller, "Integrated optics based on silicon oxynitride thin films deposited on silicon substrates for sensor applications," Sens. Actuat. A25-A27, 425-431 (1991).
30. G. N. De Brabander, J. T. Boyd, and H. E. Jackson, "Single polarization optical waveguide on silicon," IEEE J. Quantum Electron. QE-27, 575-579 (1991).
31. S. Sriam, W. D. Partlow, and C. S. Liu, "Low-loss optical waveguides using plasma-deposited silicon nitride," Appl. Opt. 22, 3664-3665 (1983).
32. W. Stutius and W. Streifer, "Silicon nitride films on silicon for optical waveguides," Appl. Opt. 16, 3218-3222 (1977).
33. E. A. J. Marcatili, "Dielectric rectangular waveguide and directional coupler for integrated optics," Bell Syst. Tech. J. 48, 2071-2102 (1969).