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Volumn 56, Issue 16, 1997, Pages 10614-10620

Enhancement of the formation of the phase of through the introduction of an interposed layer of tantalum

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0342399753     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.56.10614     Document Type: Article
Times cited : (44)

References (22)
  • 14
    • 0002673393 scopus 로고    scopus 로고
    • F. M. d’Heurle, in VLSI Science and Technology, edited by C. Dell’Oca and W. M. Bullis (The Electrochemical Society, Pennington, 1982), pp. 194-212.
    • VLSI Science and Technology , pp. 194-212
    • d’Heurle, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.