Design considerations for an acoustic MEMS filter

Microsystem Technologies

Volumn 10, Issue 8-9, 2004, Pages 585-591

  Shen, S H ^a   Fang, W ^b   Young, S T ^a  

^a NATIONAL YANG MING UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SIGNAL PROCESSING; AMPLIFIERS (ELECTRONIC); CANTILEVER BEAMS; DAMPING; ELECTROMECHANICAL FILTERS; NATURAL FREQUENCIES;

FREQUENCY BANDS; MECHANICAL STRUCTURES; NORMALIZED FREQUENCY RATIOS (NFR);

MICROELECTROMECHANICAL DEVICES;

EID: 9944261397     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0335-6     Document Type: Article

References (12)

1. McDermott H (1998) A programmable sound processor for advanced hearing aid research. IEEE Transac Rehabil Eng 6(1): 53-59
2. Mitchell J; Pruehsner W; Enderle JD (1999) Digital hearing aid. Proceedings of the IEEE 25th Annual Northeast Bioengineering Conference, pp. 133-134, connecticut
3. Adler R (1947) Compact electromechanical filter. Electronics. 20: 100-105
4. Johnson RA (1983) Mechanical filters in electronic. John Wiley & Sons, New York
5. Lin L, Howe RT; Pisano AP (1998) Microelectromechanical filters for signal processing. J Microelectromech Sys 7(3): 286-294
6. Nguyen CTC (1999) Frequency-selective MEMS for miniaturized low-power communication devices. IEEE Trans Micro The Tech 47(8): 1486-1503
7. Yang LJ; Huang TW; Chang PZ (2001) CMOS microelectromechanical bandpass filters. Sens Actua A90: 148-152
8. Wang K; Nguyen CTC (1997) High-order micromechanical electronic filters. Proceedings of the IEEE Tenth Annual International Workshop on Micro Electro Mechanical Systems, pp. 25-30, Nagoya, Japan
9. Hribšek MF (1996) Electromechanical silicon beam filter bank. Microelec J 27: 525-530
10. James ML; Smith GM; Wolford JC; Whaley PW (1994) Vibration of mechanical and structural systems. 2nd edn. HarperCollins, New York
11. Beer FP; Johnson ER (1992) Mechanics of materials. 2nd edn. McGraw-Hill, New York
12. Cheng CC; Fang W (2003) Tuning the Quality Factor of Micromachined Bulk-Silicon Micromachined Structures Using the Squeezed- Film Damping. 12th International Conference on Solid-States, Sensors, Actuators and Microsystems (Transducers' 03). pp. 1590-1593, Boston, USA