Size effect on Young's modulus of thin chromium cantilevers

Applied Physics Letters

Volumn 85, Issue 16, 2004, Pages 3555-3557

  Nilsson, S G ^a   Borrise X ^a,b   Montelius, L ^a  

^a LUND UNIVERSITY   (Sweden)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHROMIUM; CRYSTAL OSCILLATORS; DNA; ELASTICITY; ELECTRON BEAM LITHOGRAPHY; MECHANICAL PROPERTIES; MICROMACHINING; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY;

BUKLING; CANTILEVERS; INCREMENTAL FORCES; NANOMECHANICAL DEVICES;

ELASTIC MODULI;

EID: 9744272434     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1807945     Document Type: Article

References (10)

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7. We have some indications that also the length of the beam may influence the value of the effective Young's modulus. The reason for this is unclear, and further investigations are needed in order to validate this.
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10. The FEMLAB simulation gives an estimation of this effect to contribute less than 1% of the total deflection. The detailed FEMLAB simulation will be reported elsewhere.