Fabrication of wide-IF 200-300 GHz superconductor-insulator-superconductor mixers with suspended metal beam leads formed on silicon-on-insulator

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 5, 2004, Pages 2417-2422

  Kaul, Anupama B ^a   Bumble, Bruce ^a   Lee, Karen A ^a   LeDuc, Henry G ^a   Rice, Frank ^b   Zmuidzinas, Jonas ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH RECEIVERS; METAL BEAMS; SUPERCONDUCTOR-INSULATOR-SUPERCONDUCTOR (SIS) MIXERS; TROPOSPHERIC CHEMISTRY;

ALUMINUM NITRIDE; ASTROPHYSICS; BANDWIDTH; CHEMICAL VAPOR DEPOSITION; DETECTORS; ELECTRIC IMPEDANCE; ELECTRIC VARIABLES MEASUREMENT; MICROMACHINING; NIOBIUM; PHOTORESISTS; POLYMETHYL METHACRYLATES; SENSITIVITY ANALYSIS; SUPERCONDUCTING DEVICES; VIBRATION CONTROL;

SILICON ON INSULATOR TECHNOLOGY;

EID: 9744256248     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1798831     Document Type: Article

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