Design and fabrication of micro optical components for optical data storage by micromolding

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn 2, Issue , 2001, Pages

  Kang, Shinill ^a   Moon, Su Dong ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION MOLDING; DEFECTS; MICROMACHINING; OPTICAL DATA STORAGE; POLYMETHYL METHACRYLATES; SEMICONDUCTING SILICON; SUBSTRATES; VISCOSITY;

MICRO OPTICAL COMPONENTS;

MICROLENSES;

EID: 0035682022     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Fabrication and characterization of microlenses realized by a modified LIGA process
2. Dry etching for coherent refractive microlens array
3. LIGA and alternative techniques for microoptical components