Fabrication of a microchannel integrated with inner sensors and the analysis of its laminar flow characteristics

Sensors and Actuators, A: Physical

Volumn 103, Issue 3, 2003, Pages 317-329

  Park, Hojoon ^a   Pak, James Jungho ^a   Son, Sang Young ^b   Lim, Geunbae ^b   Song, Inseob ^b  

^a Korea University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Laminar flow; Microchannel; Pressure drop; RTD; TCR; Velocity

Indexed keywords

ANNEALING; FABRICATION; LAMINAR FLOW; MICROELECTROMECHANICAL DEVICES; PLATINUM; VELOCITY MEASUREMENT;

RESISTANCE TEMPERATURE DETECTORS (RTD);

SENSORS;

EID: 0037442840     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00404-1     Document Type: Article

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