An improved formulation for scheduling an automated wet-etch station

Computers and Chemical Engineering

Volumn 29, Issue 1, 2004, Pages 217-224

  Karimi, I A ^a   Tan, Zerlinda Y L ^a   Bhushan, Swarnendu ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Flowshop; MILP; Scheduling; Shared resource; Wafer fabrication; Wet etch station

Indexed keywords

MIXED INTEGER LINEAR PROGRAMMING (MILP); SCHEDULING PROBLEMS; WAFER FABRICATION; WET-ETCHING;

AUTOMATION; LINEAR PROGRAMMING; MACHINE DESIGN; PROBLEM SOLVING; ROBOTICS; SCHEDULING;

ETCHING;

CHEMICAL ENGINEERING;

AUTOMATION; CHEMICAL PROCEDURES; COMPUTER LANGUAGE; CONFERENCE PAPER; EMPIRICISM; ETCHING; PROCESS MODEL; STORAGE;

EID: 9644269022     PISSN: 00981354     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compchemeng.2004.07.007     Document Type: Conference Paper

References (8)

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