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Volumn 42, Issue 7, 2003, Pages 1391-1399

An MILP approach to automated wet-etch station scheduling

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; INTEGER PROGRAMMING; LINEAR PROGRAMMING; MATERIALS HANDLING; SCHEDULING;

EID: 0042848882     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie020296c     Document Type: Article
Times cited : (43)

References (11)
  • 1
    • 84952240555 scopus 로고
    • A review of production planning and scheduling models in the semiconductor industry. Part 1: System characteristics, performance evaluation and production planning
    • Uzsoy, R.; Lee, C. Y.; Marti-Vega, L. A. A review of production planning and scheduling models in the semiconductor industry. Part 1: System characteristics, performance evaluation and production planning. IIE Trans. 1992, 24 (4), 47.
    • (1992) IIE Trans. , vol.24 , Issue.4 , pp. 47
    • Uzsoy, R.1    Lee, C.Y.2    Marti-Vega, L.A.3
  • 2
    • 0034332901 scopus 로고    scopus 로고
    • Scheduling a single-product reentrant process with uniform processing times
    • Lamba, N.; Karimi, I. A.; Bhalla, A. Scheduling a single-product reentrant process with uniform processing times. Ind. Eng. Chem. Res. 2000, 39 (11), 4203.
    • (2000) Ind. Eng. Chem. Res. , vol.39 , Issue.11 , pp. 4203
    • Lamba, N.1    Karimi, I.A.2    Bhalla, A.3
  • 4
    • 0028744478 scopus 로고
    • Scheduling semiconductor manufacturing plants
    • Kumar, P. R. Scheduling semiconductor manufacturing plants. IEEE Control Syst. 1994, 14 (6), 33.
    • (1994) IEEE Control Syst , vol.14 , Issue.6 , pp. 33
    • Kumar, P.R.1
  • 5
    • 0033331613 scopus 로고    scopus 로고
    • Optimization of cycle time and utilization in semiconductor test manufacturing using simulation based, online, near-real-time scheduling system
    • IEEE Computer Society Press, Los Alamitos, CA
    • Sivakumar, A. I. Optimization of cycle time and utilization in semiconductor test manufacturing using simulation based, online, near-real-time scheduling system. In Proceedings of the Winter Simulation Conference; IEEE Computer Society Press, Los Alamitos, CA, 1999; p 727.
    • (1999) Proceedings of the Winter Simulation Conference , pp. 727
    • Sivakumar, A.I.1
  • 6
    • 0024090948 scopus 로고
    • Scheduling in serial multiproduct batch processes with finite interstage storage: A mixed integer linear program formulation
    • Ku, H. M.; Karimi, I. A. Scheduling in serial multiproduct batch processes with finite interstage storage: A mixed integer linear program formulation. Ind. Eng. Chem. Res. 1988, 27, 1840.
    • (1988) Ind. Eng. Chem. Res. , vol.27 , pp. 1840
    • Ku, H.M.1    Karimi, I.A.2
  • 7
    • 0024984801 scopus 로고
    • Completion time algorithms for serial multiproduct batch processes with shared storage
    • Ku, H. M.; Karimi, I. A. Completion time algorithms for serial multiproduct batch processes with shared storage. Comput. Chem. Eng. 1990, 14 (1), 49.
    • (1990) Comput. Chem. Eng. , vol.14 , Issue.1 , pp. 49
    • Ku, H.M.1    Karimi, I.A.2
  • 8
    • 0024029390 scopus 로고
    • Hoist scheduling for a PCB electroplating facility
    • Shapiro, G. W.; Nuttle, H. L. W. Hoist scheduling for a PCB electroplating facility. IIE Trans. 1988, 20 (2), 157.
    • (1988) IIE Trans. , vol.20 , Issue.2 , pp. 157
    • Shapiro, G.W.1    Nuttle, H.L.W.2
  • 9
    • 0016962332 scopus 로고
    • Mathematical programming solution of a hoist-scheduling program
    • Phillips, L. W.; Unger, P. S. Mathematical programming solution of a hoist-scheduling program. AIIE Trans. 1976, 8 (2), 219.
    • (1976) AIIE Trans. , vol.8 , Issue.2 , pp. 219
    • Phillips, L.W.1    Unger, P.S.2
  • 10
    • 0042175883 scopus 로고    scopus 로고
    • A heuristic method for single hoist cyclic scheduling
    • Zhou, Z. L.; Zu, L. H. A heuristic method for single hoist cyclic scheduling. J. Syst. Simul. 2000, 12 (4), 389.
    • (2000) J. Syst. Simul. , vol.12 , Issue.4 , pp. 389
    • Zhou, Z.L.1    Zu, L.H.2
  • 11
    • 0001548059 scopus 로고    scopus 로고
    • A tabu search approach to scheduling an automated wet etch station
    • Geiger D. C.; Kempf K. G.; Uzsoy R. A tabu search approach to scheduling an automated wet etch station. J. Manuf. Systems. 1997, 16 (2), 102.
    • (1997) J. Manuf. Systems , vol.16 , Issue.2 , pp. 102
    • Geiger, D.C.1    Kempf, K.G.2    Uzsoy, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.