Microstructure investigation of BaxSr1-xTiO 3 thin film grown on porous silicon substrate

Materials Science in Semiconductor Processing

Volumn 7, Issue 4-6 SPEC. ISS., 2004, Pages 253-258

  Liu, Weili ^a,c   Xing, Su ^a   Lian, J ^b   Wang, Lumin ^b   Song, Zhitang ^a   Lin, Chenglu ^a   Xu, Z K ^c   Chu, Paul K ^c  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b UNIVERSITY OF MICHIGAN   (United States)

^c CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Ferroelectric materials; Porous silicon; Pulsed laser deposition

Indexed keywords

BARIUM COMPOUNDS; FERROELECTRIC MATERIALS; INTERFACES (MATERIALS); MICROSTRUCTURE; MICROWAVE CIRCUITS; POROUS SILICON; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ELECTROCHEMICAL ANODIZATION; POROUS SILICON SUBSTRATES; SILICON SUBSTRATES;

THIN FILMS;

EID: 9544234496     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2004.09.022     Document Type: Conference Paper

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