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Volumn 26, Issue 4, 2000, Pages 232-234
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Improved microwave performance of spiral inductors on Si substrates by chemically anodizing a porous silicon layer
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANODIC OXIDATION;
MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;
POROUS SILICON;
SILICON WAFERS;
SUBSTRATES;
ELECTRIC INDUCTANCE;
SPIRAL INDUCTORS;
ELECTRIC INDUCTORS;
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EID: 0034247210
PISSN: 08952477
EISSN: None
Source Type: Journal
DOI: 10.1002/1098-2760(20000820)26:4<232::AID-MOP8>3.0.CO;2-7 Document Type: Article |
Times cited : (13)
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References (5)
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