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Volumn 26, Issue 4, 2000, Pages 232-234

Improved microwave performance of spiral inductors on Si substrates by chemically anodizing a porous silicon layer

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; POROUS SILICON; SILICON WAFERS; SUBSTRATES;

EID: 0034247210     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/1098-2760(20000820)26:4<232::AID-MOP8>3.0.CO;2-7     Document Type: Article
Times cited : (13)

References (5)
  • 3
    • 0031343174 scopus 로고    scopus 로고
    • On-chip spiral inductors with patterned ground shields for Si-based RF ICs
    • C.P. Yue and S.S. Wong, On-chip spiral inductors with patterned ground shields for Si-based RF ICs, IEEE J Solid-State Circuits (1998), 85-86.
    • (1998) IEEE J Solid-State Circuits , pp. 85-86
    • Yue, C.P.1    Wong, S.S.2
  • 4
    • 0029493287 scopus 로고
    • Monolithic planar inductor and waveguide structure on silicon with performance comparable to those in GaAs MMIC
    • B.K. Kim, B.K. Ko, and K. Lee, Monolithic planar inductor and waveguide structure on silicon with performance comparable to those in GaAs MMIC, Int Electron Devices Meet Tech Dig, 1995, pp. 712-720.
    • (1995) Int Electron Devices Meet Tech Dig , pp. 712-720
    • Kim, B.K.1    Ko, B.K.2    Lee, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.