Chemical surface modification on polytetrafluoroethylene films by vacuum ultraviolet excimer lamp irradiation in ammonia gas atmosphere

Applied Physics Letters

Volumn 68, Issue 19, 1996, Pages 2648-2650

  Heitz, J ^a   Niino, H ^a   Yabe, A ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000491193     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116269     Document Type: Article

References (20)

1. H. Hiraoka and S. Lazare, Appl. Surf. Sci. INS 46, 264 (1990).
2. J. T. Dickinson, J.-J. Shin, W. Jiang, and M. G. Norton, J. Appl. Phys. AIP 74, 4729 (1993).
3. H. Niino and A. Yabe, Appl. Phys. Lett. 63, 3527 (1993); H. Niino, T. Murao, S. Matsumura, and A. Yabe, Mol. Cryst. Liq. Cryst. 267, 365 (1995).
4. M. Okoshi, M. Murahara, and K. Toyoda, J. Mater. Res. AIP 7, 1912 (1992).
5. N. Ichinose, M. Maru, S. Kawanishi, Y. Izumi, and T. Yamamoto, Chem. Lett. 1995, 943 (1995).
6. L. J. Matienzo, J. A. Zimmerman, and F. D. Egitto, J. Vac. Sci. Technol. A AIP 12, 2662 (1994).
7. C. Fuchs, O. Goetzberger, R. Henck, and E. Fogarassy, Appl. Phys. A INS 60, 505 (1995).
8. P. Bergonzo and I. W. Boyd, J. Appl. Phys. AIP 76, 4372 (1994).
9. H. Esrom and U. Kogelschatz, Thin Solid Films INS 218, 231 (1992).
10. J.-Y. Zhang, H. Esrom, U. Kogelschatz, and G. Emig, Appl. Surf. Sci. INS 69, 299 (1993).
11. J.-Y. Zhang, H. Esrom, U. Kogelschatz, and G. Emig, J. Adhesion Sci. Technol. 8, 1179 (1994).
12. H. Esrom, J.-Y. Zhang, and U. Kogelschatz, ANTEC, May 8-12, 1995, Boston, MA.
13. T. Igarashi, Rev. Laser Eng. 23, 1051 (1995).
14. R. C. Plumb and D. F. Hornig, J. Chem. Phys. AIP 23, 947 (1955).
15. The oxygen content of our samples is quite high. The incorporation probably occurred outside the chamber during the time elapsed between irradiation and XPS analysis (10-25 days) (Refs. 3 6 16).
16. H. Niino and A. Yabe, Appl. Surf. Sci. (to be published).
17. Static SIMS Handbook of Polymer Analysis, edited by T. A. Hodt (Perkin Elmer, Eden Prairie, MN, 1991).
18. M. Suto and L. C. Lee, J. Chem. Phys. AIP 78, 4515 (1983).
19. H. Jucker and E. K. Rideal, J. Chem. Soc. 1957, 1058; C. C. McDonald, A. Kahn, and H. E. Grunnig, J. Chem. Phys. 22, 908 (1954).
20. G. Herzberg, Electronic Spectra and Electronic Structure of Polyatomic Molecules (Van Nostrand Reinhold, New York, 1966).