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Volumn 457-460, Issue I, 2004, Pages 543-548
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SiC studied via LEEN and cathodoluminescence spectroscopy
a a b c c |
Author keywords
Defect; Luminescence spectroscopy; Metal SiC interface; Nanoscale; Polytype; Stacking fault
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Indexed keywords
ANNEALING;
CAPACITANCE;
CATHODOLUMINESCENCE;
CHEMICAL BONDS;
CRYSTAL DEFECTS;
INTERFACES (MATERIALS);
METALLIZING;
SPECTROSCOPIC ANALYSIS;
STACKING FAULTS;
CAPACITANCE SPECTROSCOPY;
CATHODOLUMINESCENCE SPECTROSCOPY;
ELECTRON CASCADE PROFILES;
LOW ENERGY ELECTRON-EXCITED NANOSCALE (LEEN) SPECTROSCOPY;
METAL SIC INTERFACES;
NANOSCALE;
POLYTYPE;
SILICON CARBIDE;
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EID: 8744287533
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.457-460.543 Document Type: Conference Paper |
Times cited : (3)
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References (20)
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