Properties of diamond-like carbon films synthesized by dual-target unbalanced magnetron sputtering

Chinese Physics Letters

Volumn 21, Issue 11, 2004, Pages 2249-2251

  Liu, Cui ^a   Li, Guo Qing ^a   Gou, Wei ^a   Mu, Zong Xin ^a   Zhang, Cheng Wu ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FILMS; DEPOSITION RATES; FRICTION; MAGNETRON SPUTTERING; RESIDUAL STRESSES;

COMPRESSIVE RESIDUAL STRESS; DIAMOND-LIKE CARBON FILM; FILM DEPOSITION; MICROTRIBOMETER; PIN ON DISK; PROPERTY; SPUTTERING CURRENTS; SYNTHESISED; UNBALANCED MAGNETRON SPUTTERING;

DIAMOND LIKE CARBON FILMS;

EID: 8744224117     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/21/11/048     Document Type: Article

References (13)

1. Lifshitz Y 1999 Diamond Relat. Mater. 8 1659
2. Robertson J 1992 Surf. Coat. Technol 50 185
3. Aisenberg S and Chabor S 1971 J. Appl. Phys. 42 3963
4. Grill A 1999 Diamond Relat. Mater. 8 428
5. Li X, Tang Z A, Ma G J et al 2003 Chin. Phys. Lett. 20 692
6. Mei X X, Liu Z M, Ma T C et al 2003 Chin. Phys. Lett. 20 1619
7. Martin P J and Bendavid A 2001 Thin Solid Films 394 1
8. Stoney G G 1909 Proc. R. Soc. Lond. A 82 172
9. Liu Y et al 1996 Surf. Coat. Technol 82 48
10. Li L H et al 2002 Mater. Sci. Eng. B 94 95
11. Ferrari A C and Robertson J 2000 Phys. Rev. B 61 14095
12. Tuinstra F and Koening J L 1970 J. Chem. Phys. 53 1126
13. Sam Z et al 1999 Surf. Coat. Technol. 122 219