Structural characterization of alloyed Al/Ti and Ti contacts on SIC

Materials Science Forum

Volumn 457-460, Issue II, 2004, Pages 837-840

  Parisini, A ^a   Poggi, A ^a   Nipoti, R ^a  

^a CNR   (Italy)

Author keywords

Al Ti contacts; RBS; SiC; TEM; Ti contacts

Indexed keywords

ANNEALING; METALLIZING; OHMIC CONTACTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SURFACE PHENOMENA; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

ALLOYED CONTACTS; CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY (XTEM); MICROGRAPHS; STRUCTURAL CHARACTERIZATION;

ALUMINUM ALLOYS;

EID: 8644278932     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.457-460.837     Document Type: Conference Paper

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