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Volumn 85, Issue 15, 2004, Pages 3142-3144
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Injection of holes from the silicon substrate in Ta2O 5 films grown on silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT DENSITY;
ELECTRIC CONDUCTIVITY;
ELECTRIC FIELD EFFECTS;
ELECTRON TUNNELING;
ELLIPSOMETRY;
EVAPORATION;
FILM GROWTH;
LEAKAGE CURRENTS;
MIM DEVICES;
SILICA;
TANTALUM COMPOUNDS;
THERMOANALYSIS;
ULTRATHIN FILMS;
BIAS POLARITIES;
CONDUCTION MECHANISMS;
POLARITIES;
POOLE-FRENKEL EMISSION;
SILICON;
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EID: 8644278117
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1804235 Document Type: Article |
Times cited : (18)
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References (8)
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