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Volumn 85, Issue 15, 2004, Pages 3142-3144

Injection of holes from the silicon substrate in Ta2O 5 films grown on silicon

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC CONDUCTIVITY; ELECTRIC FIELD EFFECTS; ELECTRON TUNNELING; ELLIPSOMETRY; EVAPORATION; FILM GROWTH; LEAKAGE CURRENTS; MIM DEVICES; SILICA; TANTALUM COMPOUNDS; THERMOANALYSIS; ULTRATHIN FILMS;

EID: 8644278117     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1804235     Document Type: Article
Times cited : (18)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.