A microassembled large-deflection tip/tilt micromirror from a single-mask drie process

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 240-243

  Last, Matthew E ^a   Subramaniam, V ^a   Pister, Kristofer S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; MICROSYSTEMS; TETHERLINES;

DEFLECTION ANGLES; IN-PLANE MOTION; LARGE DEFLECTION; MICROFABRICATED; ROTATION MECHANISM; ROTATIONAL MOTION; SINGLE-MASK PROCESS; ZERO INSERTION FORCES;

SOLID-STATE SENSORS;

EID: 84988966850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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